Review of material measures for surface topography instrument calibration and performance verification

Abstract As the need for manufacturing of complex surface topographies increases, traceable measurement with known uncertainties can allow a process to remain stable. Material measures are link in chain that connects topography instrument’s output definition metre. In this review, use material is examined purposes instrument calibration and performance verification based on metrological characteristics framework, as introduced ISO 25178 part 600. The associated each characteristic investigated terms fabrication, geometry functionality. discussed sequential approach, focusing have been developed specific technologies optical instruments. There remains gap framework characteristic, fidelity, review highlights current methods using reference metrology alternative approaches virtual instruments quantify effects fidelity. influence primary also reviewed context uncertainty propagation. conclusion, challenges identified regards scarcity available lower nanometre range, limitations cost, complexity, time industrial applicability.